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Overview
About IGOR Pro
Versions:
    What's New

Features
Imaging
Force
Lithography
    File import
Help
    PDF Manual

 

 

Lithography
For more details on the built-in MFP3D nanolithography capabilities please see the MicroAngelo Nanolithography application Note.

Lithography File Import
You can import a number of different file formats to define the lithography patterns you want the tip to follow.  There is a standard graphic file import which can handle formats such as TIFs and BMPs.  This function takes the image and converts it to a series of contours based on the color gradient.  These contours are then used as the path for the tip to follow.  There is also a direct conversion from GDSII files.  If you use a different file format, such as DXF, there are many third party software packages which will convert your files to GDSII format.  An example of that is given in Figure 1.

Getting Help While in the MFP Software
Every control on the MFP-3D interface has a simple little button to the right of it with a "?" on it.  By clicking on these help buttons, a detailed description is brought up of what the corresponding control does.  And of course, we at Asylum are dedicated to providing the best support possible.  Often times when you call or write the support email account, the person who wrote the software, or designed the component is the one that responds.

PDF Software Help Files
We have a PDF version of the help files that are included with the MFP-3D software.  It is almost always slightly out of date, but is convenient to have all the files in one place.  If you would like a copy please email support@AsylumResearch.com.


Figure 1
Here we converted a DXF file to GDSII and imported it into the Asylum lithograph software. The floor diagram shown in this example is on a blank image, to clarify the intricate detail of the lithography pattern. The software interface also has an easy to use rotation, sizing, and offsetting controls to quickly adjust your lithography pattern to where you need it to be.

 


Asylum Research • 6310 Hollister Ave. • Santa Barbara, CA 93117 • 888-472-2795 • 805-696-6466 voice • 805-696-6444 fax • info@AsylumResearch.com