Asylum Research


Instrumented Nanoindentation


The instrumented nanoindenter accessory for MFP-3D AFMs combines the high resolution and versatility of the MFP-3D AFM with the accuracy of a true instrumented nanoindenter. The tight integration brings strong synergies to the two complementary techniques. The nanoindenter accessory enables ISO-compliant measurement of elastic modulus and the AFM allows precise characterization of both the indenter tip and the resulting indentation. Combined, they are the ultimate tool for truly quantitative nanomechanics.




Download Data Sheet (2.6 MB)


Array of indents on a low K polysilicon material, 12µm scan. Sample courtesy of M. Phillips, SBA Materials.




Oxford Instruments Asylum Research, Inc. • 6310 Hollister Ave. • Santa Barbara, CA  93117 •