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High-frequency PFM of a PZT Capacitor
PFM amplitude overlaid on AFM topography (left), and phase overlaid on topography (right) of 1µm thick
PZT film with 50nm Pt capacitor electrode. A bias was applied between the bottom and top electrodes and
the tip was electrically isolated. Taken at a frequency of ~1MHz, 5µm scan. Imaged with the MFP-3D AFM.
Image courtesy of K. Seal, S. Kalinin, S. Jesse, ORNL, and
P. Bintachitt, S. Trolier-McKinstry, Pennsylvania State University.