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Contact resonance modulus map of patterned titanium on silicon

Contact resonance modulus data overlaid on topography for a titanium (E’~110 GPa) thin film on silicon (E’~160 GPa) imaged using contact resonance mode. Imaged on a MFP-3D Infinity, 10 µm scan.

Sample courtesy of Donna Hurley, National Institute of Standards and Technology (NIST).

 


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