Asylum Research

Galleries | Nanolithography & Nanomanipulation

 

Anodic Oxidation Lithography on Silicon

A 1µm scan of anodic oxidation lithography on silicon, written in AC mode. This pattern was first imported as a
jpeg and then written with a -10V bias on a conductive cantilever tip at 20nm/s. Imaged with the MFP-3D AFM.

 


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