Galleries | Nanolithography & Nanomanipulation
Sol-gel PZT with PFM Lithography
R&D 100 logo written on a sol-gel PZT thin film by PFM lithography. PFM phase is overlaid
on top of the rendered topography, 25µm scan. Oak Ridge and Asylum Research were
awarded an R&D100 award for Band Excitation in 2008. Imaged with the MFP-3D AFM.