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PZT Capacitor Switching

0.26µm 20/80 PZT platinum top and bottom electrodes capacitor. DC bias offset from -3.5V to +3.5V in 0.25V steps using Macrobuilder. Image and histogram show evolution of ferroelectric domains through switching of 180 degrees. Built-in image stabilization fixes the XY position to within a few nm’s. 2µm scan.

Sample courtesy of Radiant Technologies.

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