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sMIM data channels

sMIM images of an SRAM sample (20 µm scan size, ~400 nm tall features). These images demonstrate the variety of data types that sMIM can measure. DC Resistance can also be measured, but is not present in this data set. Note that although semiconductor samples like this one are a very common application area for sMIM, the technique is far more general and can be applied to most samples to help distinguish between different materials.

 


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