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Contact resonance modulus map of patterned titanium on silicon

Reference sample patterned with 200nm high titanium features on a silicon substrate imaged with DART Contact Resonance mode. Image shows topography with an overlay of modulus (Si ~ 165 GPa, Ti ~ 110-125 GPa).
Contact Resonance imaging was performed using blueDrive™ photothermal cantilever excitation
on a Cypher S AFM, 25μm scan.

Sample courtesy of Donna Hurley, National Institute of Standards and Technology (NIST).

 


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