MicroAngelo™

Built-in Nanolithography and Manipulation Capabilities with the MFP-3D

Nanolithography and manipulation capabilities have actually been around for quite some time. Remember the 1990 famous IBM image of Xenon atoms manipulated using STM? Today’s demanding applications require incredibly precise and flexible instrumentation. The MFP-3D AFM offers the most power and comprehensive capabilities of any AFM currently available for nanolithography and manipulation with MicroAngelo, an easy-to use interface that is built right into every MFP-3D system.

Built-in Capabilities Without Added Expense
With MicroAngelo, you can manipulate and modify samples and surfaces on the nanometer and picoNewton scale – even down to the level of single molecules. Because the power, accuracy and precision of MicroAngelo comes inherently from the MFP-3D’s controller, NPS™ scanner, and software, MicroAngelo comes standard with every MFP-3D – there is no need for any extra special hardware or software. All data points are available for plotting. The easy-to-use interface is also compatible with popular graphic tablets and other input devices.

MicroAngelo Feature Benefits

X-Y scanner, 90 µm range

Z scanner, 16µm range

NPS' Scan Axes
X&Y: Closed loop position control with sensor noise <0.6nm absolute deviation (Adev) in 0.1-1kHz bandwidth and sensor non-linearity <0.5 % (Adev/Full travel) at full scan.
Z sensor noise <0.3nm in a 0.1-1 kHz BW and sensor non-linearity less than 0.2% (Adev/Full travel) at full scan.
Z height noise:<0.03nm.

Optical lever cantilever position detection provides low noise
<0.3Å Adev in a 0.1Hz to 1kHz bandwidth.

IGOR Pro Software — sophisticated graphics loading, interpretation and analysis software allows you to load graphics files generated elsewhere, make freehand and geometrical sketches or even plot mathematical, user-defined functions.

All data types are available for plotting during lithography including deflection, lateral force, amplitude, phase and all of the user analog to digital converters (ADCs) and digital to analog converters (DACs).

Operating Modes: Lithography can be operated in either vector based or bitmapped modes.

Lithographic contrast can be controlled by modulating the cantilever set-point (either contact or AC modes available), the cantilever drive voltage, cantilever potential or any other channel including the user DACs.

The software is compatible with a variety of input devices including popular graphics tablets such as Wacom Graphire and Intuos.

For additional MFP-3D system specifications, see our MFP-3D brochure. Note specifications subject to change without notice.

For the full text, download the PDF copy of the MicroAngelo Application Note.