Asylum Research


Overview of AFM Tools for Electrical Characterization

This application note briefly describes the operating principles and applications of four important AFM techniques that are used for electrical characterization:

  • Electric Force Microscopy (EFM)

  • Kelvin Probe Force Microscopy (KPFM, also known as surface potential imaging)

  • Conductive AFM (CAFM, also known as current mapping)

  • Nanoscale Time Dependent Dielectric Breakdown (nanoTDDB)






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KPFM image of a carbon-impregnated polyolefin film, 3 µm scan. Image taken on the MFP-3D Infinity AFM.


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